
INTRODUCTION
The micro- and nano-fabrication activity is supported by a corresponding activity on process numerical simulations. With process simulation it is possible to accurately predict the device geometry, its dopant distribution, and, with the help of device simulation software, also its electrical behavior. Several different scientific software are available in IMM-Roma and they are routinely used in the numerical simulation activity. |
Circuits, devices and processes simulation | |
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Micro/Nano fabrication |